Scanning Electron Microscopy Investigation of Surface Acoustic Wave Propagation in a 41° YX-Cut of a LiNbO3 Crystal/Si Layered Structure

The propagation process of the surface acoustic waves (SAW) and pseudo-surface (PSAW) in a bonded layered structure 41° YX-cut LiNbO3 crystal/Si(100) crystal was investigated. scanning electron microscopy (SEM) method,in low-energy secondary electrons registration mode, made it possible to visualize SAW PSAW LiNbO3/Si structure. bulk were compared. It demonstrated that velocities exceed typical for Si single crystals. In structure, 4062 m/s, 4731 5871 m/s. also are same crystal.